NEURAL PROBE ARRAY HAVING WAVEGUIDE MEMBER WITH IMPROVED WAVEGUIDE CHARACTERISTICS AND MANUFACTURING METHOD THEREOF
A neural probe array includes a probe body inserted into a testee, a fixing body supporting the back end of the probe body, a cladding extended in the longitudinal direction of the probe body in the upper end of the probe body, and an optical waveguide member which is buried along the cladding in th...
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Sprache: | eng ; kor |
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Zusammenfassung: | A neural probe array includes a probe body inserted into a testee, a fixing body supporting the back end of the probe body, a cladding extended in the longitudinal direction of the probe body in the upper end of the probe body, and an optical waveguide member which is buried along the cladding in the upper end of the cladding. The cladding is buried in a concave groove formed in the upper end of the probe body. A method for manufacturing a neural probe array includes a step of forming a groove in the upper end of a first substrate, a step of burying the groove with the cladding, a step of forming an optical waveguide member along the cladding in the upper end of the cladding, and a step of forming the probe body by cutting the first substrate. |
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