THERMAL TREATMENT SYSTEM AND METHOD OF PERFORMING THERMAL TREATMENT AND METHOD OF MANUFACTURING CIGS SOLAR CELL USING THE SAME

The present invention relates to a thermal treatment system, a thermal treatment method, and a method for manufacturing a CIGS solar cell using the same. The thermal treatment system includes a reaction chamber which includes a reaction space, an external chamber which is separated from the reaction chamber with a preset distance and surrounds the reaction chamber, a heater module which includes a first heater module between the reaction chamber and the external chamber, a door chamber which opens or closes the reaction space of the reaction chamber, an internal cooling system which is connected to the reaction space to cool the inside of the reaction chamber, and an external cooling system which is connected to a buffer space between the reaction chamber and the external chamber to cool the outer wall of the reaction chamber. According to the present invention, the reaction chamber is efficiently cooled for a short time after a reaction completion by separately performing a first cooling process and a second cooling process for the reaction chamber using the external cooling system to cool the outer wall of the reaction chamber.