REVERSAL UNIT AND SUBSTRATE TRANSFERRING DEVICE USING THIS

A reversal unit, a substrate transferring apparatus, and a substrate transferring method are disclosed. The disclosed reversal unit comprises: a reversal supporting unit which supports a substrate by attaching and supporting; a reversal shaft unit fixated in the reversal supporting unit; and a rever...

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Bibliographische Detailangaben
Hauptverfasser:	CHUNG, TAE HOON, YOO, DAE YEON, KIM, JONG BACK, HAN, SANG EI, LEE, JOO SECK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A reversal unit, a substrate transferring apparatus, and a substrate transferring method are disclosed. The disclosed reversal unit comprises: a reversal supporting unit which supports a substrate by attaching and supporting; a reversal shaft unit fixated in the reversal supporting unit; and a reversal driving unit which rotates the reversal shaft unit either forwards or backwards.