COMBINED ELECTRO STATIC CHUCK AND HEATER

The present invention relates to a heater-cum-electrostatic chuck including a metallic base material; a dielectric layer that is formed on the metallic base material; and an electrode layer that is provided in the dielectric layer and is capable of performing electrostatic force generation and heat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BYON, EUNG SUN, KIM, JONG KUK, NAM, UK HEE, LEE, JUNG HWAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!