GAS LEAKAGE PREVENTION APPARATUS

GAS LEAKAGE PREVENTION APPARATUS

PURPOSE: A toxic gas leakage preventing apparatus of a collecting bath is provided to prevent the backflow of toxic gas by including top and bottom opening and closing plates. CONSTITUTION: A device body(130) is combined with an overflow pipe of a collecting bath and forms a fluid path to which chem...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HAN, YOUNG SU, BAE, MYUNG JIN, KO, GUN TAE, SHIN, DUCK SOO, LEE, YOUNG SOO
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PURPOSE: A toxic gas leakage preventing apparatus of a collecting bath is provided to prevent the backflow of toxic gas by including top and bottom opening and closing plates. CONSTITUTION: A device body(130) is combined with an overflow pipe of a collecting bath and forms a fluid path to which chemical solutions are outputted. A fluid path opening and closing unit(140) opens and closes the fluid path of the device body. A unit plate is combined with an inner space of the device body. A chemical solution discharge unit discharges the chemical solutions.