PAD CONDITIONING DISK AND PAD CONDITIONER AND PAD CONDITIONING METHOD

PAD CONDITIONING DISK AND PAD CONDITIONER AND PAD CONDITIONING METHOD

PURPOSE: A pad conditioning disk, a pad conditioner, and a pad conditioning method are provided to easily maintain the flatness of a disk by replacing only the polishing part. CONSTITUTION: A polishing part(313) protrudes from a plate and conditions the surface of a polishing pad. A connection part(...

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Bibliographische Detailangaben
Hauptverfasser: PARK, JI HO, CHOI, WON SEUK, KIM, TAE SUNG, KIM, TAE HOON, KIM, MIN GU, LEE, SEUNG HOON, KIM, HO JOONG
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PURPOSE: A pad conditioning disk, a pad conditioner, and a pad conditioning method are provided to easily maintain the flatness of a disk by replacing only the polishing part. CONSTITUTION: A polishing part(313) protrudes from a plate and conditions the surface of a polishing pad. A connection part(314) passes through the polishing part and forms a moving path of residues generated in a conditioning process. A penetration unit(312) penetrates through the plate to be connected to the connection part.