PREPARATION OF PATTERNED GRAPHENE APPLICABLE TO GRAPHENE-BASED DEVICE

PREPARATION OF PATTERNED GRAPHENE APPLICABLE TO GRAPHENE-BASED DEVICE

PURPOSE: A method for manufacturing a patterned graphene applied to a graphene based device is provided to manufacture a single-multilayered graphene with a desirable pattern by using a patterned metal catalyst layer. CONSTITUTION: A substrate is prepared. A mask is fixed to the substrate. A pattern...

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Bibliographische Detailangaben
Hauptverfasser: AN, KI SEOK, LEE, YOUNG KUK, JUNG, DAE SUNG, LEE, SUN SOOK, SHIN, YONG SOOK, KIM, CHANG GYOUN, CHUNG, TAEK MO, PARK, BO KEUN, JEONG, SEOG JONG
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:PURPOSE: A method for manufacturing a patterned graphene applied to a graphene based device is provided to manufacture a single-multilayered graphene with a desirable pattern by using a patterned metal catalyst layer. CONSTITUTION: A substrate is prepared. A mask is fixed to the substrate. A patterned metal catalyst layer is formed on the substrate. A graphene layer is grown on the metal catalyst layer. The grown graphene layer is transferred to the insulation layer.