MICRO COIL AND FABRICATION METHOD OF THEREOF

PURPOSE: A micro-coil and a manufacturing method thereof are provided to prevent delay of heat transfer from a micro-coil to an object and accurately produce or detect heat. CONSTITUTION: A glass film(130) is formed to cover an opening(151) formed in a chamber(150). The glass film is formed in a sha...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YANG, JUNE SEO, KWON, SE JIN, LEE, JONG KWANG, SEO, DAE BAN
Format: Patent
Sprache:eng ; kor
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PURPOSE: A micro-coil and a manufacturing method thereof are provided to prevent delay of heat transfer from a micro-coil to an object and accurately produce or detect heat. CONSTITUTION: A glass film(130) is formed to cover an opening(151) formed in a chamber(150). The glass film is formed in a shape corresponding to the shape of the chamber and has a larger area than the opening. A printed coil(110) is formed on the opposite side of the opening, and both ends of the printed coil are connected to an external circuit.