MICRO COIL AND FABRICATION METHOD OF THEREOF
PURPOSE: A micro-coil and a manufacturing method thereof are provided to prevent delay of heat transfer from a micro-coil to an object and accurately produce or detect heat. CONSTITUTION: A glass film(130) is formed to cover an opening(151) formed in a chamber(150). The glass film is formed in a sha...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | PURPOSE: A micro-coil and a manufacturing method thereof are provided to prevent delay of heat transfer from a micro-coil to an object and accurately produce or detect heat. CONSTITUTION: A glass film(130) is formed to cover an opening(151) formed in a chamber(150). The glass film is formed in a shape corresponding to the shape of the chamber and has a larger area than the opening. A printed coil(110) is formed on the opposite side of the opening, and both ends of the printed coil are connected to an external circuit. |
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