APPARATUS FOR FORMING A PATTERN ON A SUBSTRATE AND METHOD OF FORMING A PATTERN USING THE SAME APPARATUS

PURPOSE: An apparatus and a method for forming a pattern are provided to increase the number of substrates, which are possible to be processed at a time, since the inner loading spaced of a loader and an unloader are expanded. CONSTITUTION: An apparatus(1000) for forming a pattern comprises a proces...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	LEE, KYOON WON, LEE, KYU HONG, MAENG, JI YE, KIM, SUNG IHL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CONVEYING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS SOLDERING OR UNSOLDERING STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING WELDING WORKING BY LASER BEAM
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PURPOSE: An apparatus and a method for forming a pattern are provided to increase the number of substrates, which are possible to be processed at a time, since the inner loading spaced of a loader and an unloader are expanded. CONSTITUTION: An apparatus(1000) for forming a pattern comprises a processing unit and a substrate unloader(700). The processing unit processes a substrate so that neighboring pattern traces are spaced by the transfer pitch of the substrate. The processing unit comprises a support(100), a substrate transfer unit(200), a pair of laser generators(300) and a laser guiding unit(400). A support bridge comprises a pair of legs and a top plate. The top plate is fixed to the tops of the legs. The top plate crosses a support plate along a width. A rotating member is rotatably fixed to the center of the top plate. The substrate unloader forms a pattern on the surface of the substrate through a inline process.