TRAY AND MANUFACTURING DEVICE USING THE TRAY

PURPOSE: A tray and a manufacturing method thereof are provided to uniformly transmit the temperature of a chuck to support a tray by integrating the tray with a movement preventing unit which prevents the movement of a substrate. CONSTITUTION: A tray includes a disk body, a substrate insertion hole(20), and a cover(40). A plurality of substrate insertion holes passes through the upper and lower sides of the body. A movement preventing unit(11) is formed on the upper side of the body. The cover supports the substrate without moving in the substrate insertion hole. A first sealing maintaining unit is contacted with the side of the substrate insertion hole to maintain a sealed state and prevents the separation of the body. A second sealing maintaining unit is formed on one side of the body and provides a space between the substrate and the body.