APPARATUS FOR INSPECTING FPD

An apparatus for inspecting a substrate is provided to make an operation of an articular robot conveniently and enable an operator to change enlargement of a micro portion of macro inspection frequently to inspect. A base(1) is formed on a floor supporting a mobile unit(2). The mobile unit drives a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JIN, GI OK, CHOI, KU WON
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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