APPARATUS FOR INSPECTING FPD

An apparatus for inspecting a substrate is provided to make an operation of an articular robot conveniently and enable an operator to change enlargement of a micro portion of macro inspection frequently to inspect. A base(1) is formed on a floor supporting a mobile unit(2). The mobile unit drives a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	JIN, GI OK, CHOI, KU WON
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	An apparatus for inspecting a substrate is provided to make an operation of an articular robot conveniently and enable an operator to change enlargement of a micro portion of macro inspection frequently to inspect. A base(1) is formed on a floor supporting a mobile unit(2). The mobile unit drives a substrate holder in which a substrate is installed in a 3D forward direction at multi shafts. The substrate holder is installed in the mobile unit and the substrate holder is operated at multi shafts. The substrate holder grips an inspection substrate. A backlight unit is installed at the back side of the substrate holder. The backlight unit applies light in the substrate gripped on the substrate holder. An observation room is equipped in a front surface of the substrate holder.