DEVICE COMPENSATING CONCAVE WAVEFRONT DEFORMATION OF A MEMBRANE DEFORMABLE MIRROR USING A CURVATURE ADJUSTABLE MIRROR
A wavefront compensation apparatus of a thin film deformmable mirror using a curvature adjustment mirror is provided to compensate negative curvature deformation of the thin film deformmable mirror by using the curvature adjustment mirror having a positive curvature adjustment function. A reflector(...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A wavefront compensation apparatus of a thin film deformmable mirror using a curvature adjustment mirror is provided to compensate negative curvature deformation of the thin film deformmable mirror by using the curvature adjustment mirror having a positive curvature adjustment function. A reflector(10) converts a direction of light delivered from an observation object into a curvature adjustment mirror(20). The curvature adjustment mirror converts the direction of the light delivered from the reflector into a thin film deformmable mirror(40) and is used for amending the concave deformation of the thin film deformmable mirror by using a curvature adjustment function. The thin film deformmable mirror includes a thin film having a mirror function installed therein and transforms a shape of the thin film by electric force. A controller(50) applies a bias voltage and a control voltage in order to transform the shape of the thin film in the thin film deformmable mirror. |
---|