DEVICE COMPENSATING CONCAVE WAVEFRONT DEFORMATION OF A MEMBRANE DEFORMABLE MIRROR USING A CURVATURE ADJUSTABLE MIRROR

A wavefront compensation apparatus of a thin film deformmable mirror using a curvature adjustment mirror is provided to compensate negative curvature deformation of the thin film deformmable mirror by using the curvature adjustment mirror having a positive curvature adjustment function. A reflector(...

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Bibliographische Detailangaben
1. Verfasser: NAH, JA KYOUNG
Format: Patent
Sprache:eng
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Zusammenfassung:A wavefront compensation apparatus of a thin film deformmable mirror using a curvature adjustment mirror is provided to compensate negative curvature deformation of the thin film deformmable mirror by using the curvature adjustment mirror having a positive curvature adjustment function. A reflector(10) converts a direction of light delivered from an observation object into a curvature adjustment mirror(20). The curvature adjustment mirror converts the direction of the light delivered from the reflector into a thin film deformmable mirror(40) and is used for amending the concave deformation of the thin film deformmable mirror by using a curvature adjustment function. The thin film deformmable mirror includes a thin film having a mirror function installed therein and transforms a shape of the thin film by electric force. A controller(50) applies a bias voltage and a control voltage in order to transform the shape of the thin film in the thin film deformmable mirror.