SEMI-CONDUCTOR SPECIAL GAS MIXING DEVICE
The special gas mixer for semiconductor is provided to improve the safety of operator and to prevent the gas reservoir from being broken away from the mixer. The special gas mixer for semiconductor comprises clogging frame, rotation frame(210), floor panel(220), a plurality of tank supporting parts(...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The special gas mixer for semiconductor is provided to improve the safety of operator and to prevent the gas reservoir from being broken away from the mixer. The special gas mixer for semiconductor comprises clogging frame, rotation frame(210), floor panel(220), a plurality of tank supporting parts(230), gas reservoir settling portion(200), rotating means, gas reservoir grip portion(400). The clogging frame is installed at the floor side(10). The rotation frame is connected to mainframe to be rotatable. The floor panel is equipped in the bottom of the rotation frame. The tank supporting part is pivotally installed at the floor panel and the bottom surface of the gas reservoir is contacted. The gas reservoir settling portion comprise the tank insertion part(240). The rotating means rotates the tank supporting part of the gas reservoir settling portion. The grip portion is installed at the upper of the gas reservoir settling portion and holds the upper end circumferential surface of the gas reservoir. |
---|