METHOD OF MONITORING MALFUNCTION OF GALVANO SCANNER

A scanner malfunction sensing method is provided to sense whether a scanner is out of order during laser marking, increase the accuracy of the marking, and stop unnecessary marking on a substrate by the scanner which is out of order, thereby increase work efficiency. A laser enable signal in which a laser enable section for emitting a laser beam(10) is included is generated. In order to move scanners(71,72) to a target location, target location data is inputted to the scanner. Actual location data measuring the current location of the scanner moved by the target location data is acquired. A location error value which is the difference between actual position data and target location data in the laser enable section is calculated. When the location error value is greater than the critical value which is the reference for determining whether the scanner malfunctions, the malfunction of the scanner is processed.