APPARATUS FOR CONTROLLING TEMPERATURE IN CHEMICAL CONTAINER AND PHOTORESIST COATING APPARATUS USING THE SAME

An apparatus for controlling temperature of a chemical container and a photoresist coating apparatus using the same are provided to control accurately temperature of an internal container by using a temperature measurement and a thermocouple. A chemical container is installed in an inside of an inte...

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Bibliographische Detailangaben
1. Verfasser:	KIM, MOON WOO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	An apparatus for controlling temperature of a chemical container and a photoresist coating apparatus using the same are provided to control accurately temperature of an internal container by using a temperature measurement and a thermocouple. A chemical container is installed in an inside of an internal container(36). A temperature measurement unit is installed in the internal container to measure the temperature of the internal container. A plurality of thermocouples(40) are installed through each of wall sides of the internal container to perform a heat absorbing operation in an internal wall side and to a heat radiating operation in an external wall side. An external container(26) is formed to protect the internal container. The temperature of the internal container is controlled accurately by using the temperature measurement unit and the thermocouples.