SUBSTRATE TRANSFERING APPARATUS

An apparatus for transferring a substrate is provided to absorb impact by minimizing the number of time that impact is applied to the corner of a substrate and by including an impact absorbing unit. A support unit(510,520) supports the lateral surface of a vertically erect substrate(300). The substr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARK, WOO YOUL, KIM, PAL KON
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:An apparatus for transferring a substrate is provided to absorb impact by minimizing the number of time that impact is applied to the corner of a substrate and by including an impact absorbing unit. A support unit(510,520) supports the lateral surface of a vertically erect substrate(300). The substrate is transferred by a conveyor belt(100). A driving part(231,232) is positioned at both ends of the conveyor belt to drive the conveyor belt, maintaining the tension of the conveyor belt. An impact absorbing belt is installed outside the conveyor belt. The impact absorbing belt can include an inner belt member made of a magnetic material and an outer belt member made of a magnetic material of the same polarity as that of the inner belt member confronting the outer belt member. The outer surface of the conveyor belt is surrounded by the inner belt member. The inner belt member is surrounded by the outer belt member, separated from the outer belt member by a uniform interval.