TREATMENT METHOD FOR WASTE ORGANIC SOLVENT CONTAINING PHOTORESIST COMPONENT

A treatment method of a waste organic solvent containing photoresist components is provided to minimize process troubles due to the photoresist components and increase the recovery ratio of organic solvent in a subsequent process of regenerating the waste organic solvent by efficiently removing the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JEONG, JIN BAE, MUN, JAE WOONG, LEE, SANG DAE, LEE, MYUNG HO
Format:	Patent
Sprache:	eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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