APPARATUS FOR PROCESSING GLASS SUBSTRATE

A substrate processing apparatus is provided to vary the area of a stage supporting a substrate according to a size of a substrate in manufacturing a flat display. First variable stages(120) are installed on upper and lower portions of a stationary stage(110), and second variable stages(130) are ins...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KIM, JAE KWANG, NOH, HYOUNG RAE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A substrate processing apparatus is provided to vary the area of a stage supporting a substrate according to a size of a substrate in manufacturing a flat display. First variable stages(120) are installed on upper and lower portions of a stationary stage(110), and second variable stages(130) are installed at left and right sides of the stationary stage. The first and second variable stages are moved by an adjusting member through a driving unit(150). The adjusting member has first left and right screws(162) connected to the first variable stages at both ends thereof and second left and right screws(164) connected to the second variable stages at both ends thereof.