MULTI-HEAD DRIVING APPARATUS FOR SEMI-CONDUCTOR CHIP RESIN POTTING MACHINE

A multiple head driving apparatus of a resin coater for a semiconductor device is provided to improve coating capability of resin and to reduce the time necessary for a resin coating process by increasing the number of head units installed within a predetermined space and driving quickly precisely t...

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Bibliographische Detailangaben
1. Verfasser: KANG, BYUNG HWAN
Format: Patent
Sprache:eng
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