MULTI-HEAD DRIVING APPARATUS FOR SEMI-CONDUCTOR CHIP RESIN POTTING MACHINE

A multiple head driving apparatus of a resin coater for a semiconductor device is provided to improve coating capability of resin and to reduce the time necessary for a resin coating process by increasing the number of head units installed within a predetermined space and driving quickly precisely t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	KANG, BYUNG HWAN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPARATUS SPECIALLY ADAPTED THEREFOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	A multiple head driving apparatus of a resin coater for a semiconductor device is provided to improve coating capability of resin and to reduce the time necessary for a resin coating process by increasing the number of head units installed within a predetermined space and driving quickly precisely the head units. A multiple head driving apparatus for a semiconductor device manufacturing resin coater includes a stator(110) of an LM(Linear Motor), a plurality of movers, a plurality of LM guide units, head units, and driving units. The plurality of movers(120) are connected to the stator. The plurality of movers are used for forming the LM together with the stator. The plurality of LM guide units(GU) are loaded to the movers, respectively. The head units(H) are connected to the LM guide units, respectively. The driving units are connected to the LM guide units in order to move the head unit.