A METHOD FOR MANUFACTURING MICRO-REFORMER FOR FUEL CELL
A micro-reformer manufacturing method which prevents the leakage of fuel from a reformer more certainly and further improves the efficiency of the reformer accordingly by increasing compactness of the bonding structure of a catalyst layer and a glass anodic bonding is provided. A method for manufact...
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| creator | GIL, JAE HYOUNG JANG, JAE HYUK LEE, HONG RYUL KIM, SUNG HAN LEE, RO WOON OH, YOUNG SOO HA, JI WON |
| description | A micro-reformer manufacturing method which prevents the leakage of fuel from a reformer more certainly and further improves the efficiency of the reformer accordingly by increasing compactness of the bonding structure of a catalyst layer and a glass anodic bonding is provided. A method for manufacturing a micro-reformer(1) using a silicon wafer(10) comprises: a first step of forming a channel(20) for fuel evaporation and hydrogen reforming in the reformer; a second step of forming a heating wire(40) in a lower part of the wafer; a third step of coating a first dry film photoresist(50) on an upper surface of the wafer, and removing the dry film photoresist on a channel portion; a fourth step of coating a first catalyst layer(70) on the channel and the first dry film photoresist, and heat treating the first catalyst layer; a fifth step of removing portions of the first catalyst layer and the first dry film photoresist other than the channel, and coating a second dry film photoresist(50'); a sixth step of coating a second catalyst layer on upper surfaces of the first catalyst and the second dry film photoresist, and heat treating the second catalyst layer; a seventh step of removing portions of the second catalyst layer and the second dry film photoresist other than the channel; and an eighth step of bonding a glass anodic bonding(80) onto upper and lower surfaces of the wafer. |
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A method for manufacturing a micro-reformer(1) using a silicon wafer(10) comprises: a first step of forming a channel(20) for fuel evaporation and hydrogen reforming in the reformer; a second step of forming a heating wire(40) in a lower part of the wafer; a third step of coating a first dry film photoresist(50) on an upper surface of the wafer, and removing the dry film photoresist on a channel portion; a fourth step of coating a first catalyst layer(70) on the channel and the first dry film photoresist, and heat treating the first catalyst layer; a fifth step of removing portions of the first catalyst layer and the first dry film photoresist other than the channel, and coating a second dry film photoresist(50'); a sixth step of coating a second catalyst layer on upper surfaces of the first catalyst and the second dry film photoresist, and heat treating the second catalyst layer; a seventh step of removing portions of the second catalyst layer and the second dry film photoresist other than the channel; and an eighth step of bonding a glass anodic bonding(80) onto upper and lower surfaces of the wafer.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CHEMISTRY ; COMPOUNDS THEREOF ; ELECTRICITY ; INORGANIC CHEMISTRY ; METALLURGY ; NON-METALLIC ELEMENTS ; PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY</subject><creationdate>2007</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20070704&DB=EPODOC&CC=KR&NR=100735449B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25546,76297</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20070704&DB=EPODOC&CC=KR&NR=100735449B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GIL, JAE HYOUNG</creatorcontrib><creatorcontrib>JANG, JAE HYUK</creatorcontrib><creatorcontrib>LEE, HONG RYUL</creatorcontrib><creatorcontrib>KIM, SUNG HAN</creatorcontrib><creatorcontrib>LEE, RO WOON</creatorcontrib><creatorcontrib>OH, YOUNG SOO</creatorcontrib><creatorcontrib>HA, JI WON</creatorcontrib><title>A METHOD FOR MANUFACTURING MICRO-REFORMER FOR FUEL CELL</title><description>A micro-reformer manufacturing method which prevents the leakage of fuel from a reformer more certainly and further improves the efficiency of the reformer accordingly by increasing compactness of the bonding structure of a catalyst layer and a glass anodic bonding is provided. A method for manufacturing a micro-reformer(1) using a silicon wafer(10) comprises: a first step of forming a channel(20) for fuel evaporation and hydrogen reforming in the reformer; a second step of forming a heating wire(40) in a lower part of the wafer; a third step of coating a first dry film photoresist(50) on an upper surface of the wafer, and removing the dry film photoresist on a channel portion; a fourth step of coating a first catalyst layer(70) on the channel and the first dry film photoresist, and heat treating the first catalyst layer; a fifth step of removing portions of the first catalyst layer and the first dry film photoresist other than the channel, and coating a second dry film photoresist(50'); a sixth step of coating a second catalyst layer on upper surfaces of the first catalyst and the second dry film photoresist, and heat treating the second catalyst layer; a seventh step of removing portions of the second catalyst layer and the second dry film photoresist other than the channel; and an eighth step of bonding a glass anodic bonding(80) onto upper and lower surfaces of the wafer.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHEMISTRY</subject><subject>COMPOUNDS THEREOF</subject><subject>ELECTRICITY</subject><subject>INORGANIC CHEMISTRY</subject><subject>METALLURGY</subject><subject>NON-METALLIC ELEMENTS</subject><subject>PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2007</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDB3VPB1DfHwd1Fw8w9S8HX0C3VzdA4JDfL0c1fw9XQO8tcNcgXK-LoGgRW4hbr6KDi7-vjwMLCmJeYUp_JCaW4GZTfXEGcP3dSC_PjU4oLE5NS81JJ47yBDAwNzY1MTE0snJ0Nj4lQBAMNrKP0</recordid><startdate>20070704</startdate><enddate>20070704</enddate><creator>GIL, JAE HYOUNG</creator><creator>JANG, JAE HYUK</creator><creator>LEE, HONG RYUL</creator><creator>KIM, SUNG HAN</creator><creator>LEE, RO WOON</creator><creator>OH, YOUNG SOO</creator><creator>HA, JI WON</creator><scope>EVB</scope></search><sort><creationdate>20070704</creationdate><title>A METHOD FOR MANUFACTURING MICRO-REFORMER FOR FUEL CELL</title><author>GIL, JAE HYOUNG ; JANG, JAE HYUK ; LEE, HONG RYUL ; KIM, SUNG HAN ; LEE, RO WOON ; OH, YOUNG SOO ; HA, JI WON</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR100735449BB13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2007</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHEMISTRY</topic><topic>COMPOUNDS THEREOF</topic><topic>ELECTRICITY</topic><topic>INORGANIC CHEMISTRY</topic><topic>METALLURGY</topic><topic>NON-METALLIC ELEMENTS</topic><topic>PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY</topic><toplevel>online_resources</toplevel><creatorcontrib>GIL, JAE HYOUNG</creatorcontrib><creatorcontrib>JANG, JAE HYUK</creatorcontrib><creatorcontrib>LEE, HONG RYUL</creatorcontrib><creatorcontrib>KIM, SUNG HAN</creatorcontrib><creatorcontrib>LEE, RO WOON</creatorcontrib><creatorcontrib>OH, YOUNG SOO</creatorcontrib><creatorcontrib>HA, JI WON</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>GIL, JAE HYOUNG</au><au>JANG, JAE HYUK</au><au>LEE, HONG RYUL</au><au>KIM, SUNG HAN</au><au>LEE, RO WOON</au><au>OH, YOUNG SOO</au><au>HA, JI WON</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>A METHOD FOR MANUFACTURING MICRO-REFORMER FOR FUEL CELL</title><date>2007-07-04</date><risdate>2007</risdate><abstract>A micro-reformer manufacturing method which prevents the leakage of fuel from a reformer more certainly and further improves the efficiency of the reformer accordingly by increasing compactness of the bonding structure of a catalyst layer and a glass anodic bonding is provided. A method for manufacturing a micro-reformer(1) using a silicon wafer(10) comprises: a first step of forming a channel(20) for fuel evaporation and hydrogen reforming in the reformer; a second step of forming a heating wire(40) in a lower part of the wafer; a third step of coating a first dry film photoresist(50) on an upper surface of the wafer, and removing the dry film photoresist on a channel portion; a fourth step of coating a first catalyst layer(70) on the channel and the first dry film photoresist, and heat treating the first catalyst layer; a fifth step of removing portions of the first catalyst layer and the first dry film photoresist other than the channel, and coating a second dry film photoresist(50'); a sixth step of coating a second catalyst layer on upper surfaces of the first catalyst and the second dry film photoresist, and heat treating the second catalyst layer; a seventh step of removing portions of the second catalyst layer and the second dry film photoresist other than the channel; and an eighth step of bonding a glass anodic bonding(80) onto upper and lower surfaces of the wafer.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOUNDS THEREOF ELECTRICITY INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY |
| title | A METHOD FOR MANUFACTURING MICRO-REFORMER FOR FUEL CELL |
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