A METHOD FOR MANUFACTURING MICRO-REFORMER FOR FUEL CELL
A micro-reformer manufacturing method which prevents the leakage of fuel from a reformer more certainly and further improves the efficiency of the reformer accordingly by increasing compactness of the bonding structure of a catalyst layer and a glass anodic bonding is provided. A method for manufact...
Gespeichert in:
Hauptverfasser: | , , , , , , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A micro-reformer manufacturing method which prevents the leakage of fuel from a reformer more certainly and further improves the efficiency of the reformer accordingly by increasing compactness of the bonding structure of a catalyst layer and a glass anodic bonding is provided. A method for manufacturing a micro-reformer(1) using a silicon wafer(10) comprises: a first step of forming a channel(20) for fuel evaporation and hydrogen reforming in the reformer; a second step of forming a heating wire(40) in a lower part of the wafer; a third step of coating a first dry film photoresist(50) on an upper surface of the wafer, and removing the dry film photoresist on a channel portion; a fourth step of coating a first catalyst layer(70) on the channel and the first dry film photoresist, and heat treating the first catalyst layer; a fifth step of removing portions of the first catalyst layer and the first dry film photoresist other than the channel, and coating a second dry film photoresist(50'); a sixth step of coating a second catalyst layer on upper surfaces of the first catalyst and the second dry film photoresist, and heat treating the second catalyst layer; a seventh step of removing portions of the second catalyst layer and the second dry film photoresist other than the channel; and an eighth step of bonding a glass anodic bonding(80) onto upper and lower surfaces of the wafer. |
---|