MULTI-METAL COPLANAR WAVEGUIDE

MULTI-METAL COPLANAR WAVEGUIDE

A multi-layer wiring coplanar waveguide is provided to minimize the loss of a coplanar waveguide and to maximize slow-wave effect by using an intermediate metal layer having a width less than that of a ground. An uppermost metal layer is designed with a ground(41)-signal(40)-ground(41). An intermedi...

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Bibliographische Detailangaben
Hauptverfasser: JUNG, HEE BUM, YU, HYUN KYU, KWAK, MYUNG SHIN, KIM, CHEON SOO, PARK, MUN YANG, KIM, SEONG DO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:A multi-layer wiring coplanar waveguide is provided to minimize the loss of a coplanar waveguide and to maximize slow-wave effect by using an intermediate metal layer having a width less than that of a ground. An uppermost metal layer is designed with a ground(41)-signal(40)-ground(41). An intermediate layer(43) has a structure for maximizing volume where an electromagnetic wave propagates. A lowermost metal layer is used as a shield layer and connected through the ground of the uppermost metal layer, the intermediate layer, and the via-hole. The intermediate layer is comprised of a plurality of intermediate metal layers located at a lower of the ground of the uppermost metal layer. The intermediate metal layers have a width less than that of the ground.