A DEVICE FOR TRANSFERRING BOARD

A substrate transfer device is provided to transfer a substrate from one chamber to the other chamber through the individual drive. A substrate transfer device includes a fixing unit(21), a driving unit(22), a supporting unit(23), an installation unit(24), and a rotating body(31). The fixing unit(21...

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Bibliographische Detailangaben
Hauptverfasser:	LEE, YONG HAN, YOUN, SUK WON
Format:	Patent
Sprache:	eng
Schlagworte:	CONVEYING ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A substrate transfer device is provided to transfer a substrate from one chamber to the other chamber through the individual drive. A substrate transfer device includes a fixing unit(21), a driving unit(22), a supporting unit(23), an installation unit(24), and a rotating body(31). The fixing unit(21) is horizontally installed. The driving unit(22) is rotatably connected to a side of the fixing unit(21). A connection part of the driving unit(22) is rotated as a rotation shaft by the driving of a motor. The supporting unit(23) is rotatably connected to the other side of the fixing unit(21) to correspond to the driving unit(22). The installation unit(24) installs a substrate by connecting both ends thereof to upper ends of the driving unit(22) and the supporting unit(23) respectively. The rotating body(31) to rotate the fixing unit(21) is formed at a lower end of the fixing unit(21).