FILAMENT MEMBER AND ION SOURCE OF AN ION IMPLANTATION APPARATUS HAVING THE FILAMENT MEMBER

FILAMENT MEMBER AND ION SOURCE OF AN ION IMPLANTATION APPARATUS HAVING THE FILAMENT MEMBER

A filament member, ion source, and an ion implantation apparatus. The filament member may have a plate shape, and the thermoelectron emitter may include slots and a plurality of conductive paths disposed around the slots to emit thermoelectrons.

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Bibliographische Detailangaben
Hauptverfasser: KWON, UI HUI, HUH, NO HYUN, KIM, SEONG GU, WON, JAI HYUNG, CHA, KWANG HO, KEUM, GYEONG SU
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A filament member, ion source, and an ion implantation apparatus. The filament member may have a plate shape, and the thermoelectron emitter may include slots and a plurality of conductive paths disposed around the slots to emit thermoelectrons.