SEMICONDUCTIVE FILMS FLATNESS CORRECTION APPARATUS AND METHOD FOR SERVING ON POTTER IN A POTTING SYSTEM

An apparatus and a method for correcting flatness of a semiconductor film supplied to a potter in a potting system are provided to improve a potting work by using a linear variable differential transformer. Sensor units(71,72) measure flatness of a semiconductor film(40). A motor(10) is reverse-rota...

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Bibliographische Detailangaben

1. Verfasser:	KANG, BYUNG HWAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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