SEMICONDUCTIVE FILMS FLATNESS CORRECTION APPARATUS AND METHOD FOR SERVING ON POTTER IN A POTTING SYSTEM

An apparatus and a method for correcting flatness of a semiconductor film supplied to a potter in a potting system are provided to improve a potting work by using a linear variable differential transformer. Sensor units(71,72) measure flatness of a semiconductor film(40). A motor(10) is reverse-rotatable and forward-rotatable. A semiconductor supporting unit(22) is located on a lower end of a semiconductor film to support. An LM guide(21) is connected to a shaft of the motor. The LM guide is connected to the semiconductor film supporting unit to move vertically. A dispenser(60) is attached to a robot installed in a porter. An LVDT(Linear Variable Differential Transformer)(30) detects and measures a mechanical displacement by using a mutual inductance change. The LVDT converts the mechanical displacement into an electrical signal. A control unit receives an output signal of the sensor unit to calculate a moving distance of the semiconductor film. The control unit controls the motor to move the semiconductor film supporting unit and the dispenser upwardly depending on a calculated moving distance.