APPARATUS FOR SPIN COATING

A spin coating apparatus is provided to reduce defect rate of a product by removing bubbles included in coating liquid sprayed to a coating target. A spin chuck(230) is installed in a coater main frame(200). A target coating body(235) is mounted on the spin chuck. A rotational shaft(220) is connected to a motor unit(210) and the spin chuck to transmit rotational energy generated by the motor unit to the spin chuck. A liquid supplying apparatus is formed on an upper portion of the coater main frame to be separated therefrom. The liquid supplying apparatus includes a liquid inflow unit(270), a liquid discharge unit(255), and a helical curve trap unit(260). A predetermine liquid is flowed in the liquid inflow unit having a first inner diameter. The liquid discharge unit having a second inner diameter supplies the flowed liquid to the target coating body mounted on the spin chuck. An end of the liquid discharge unit is a nozzle. The helical curve trap unit is installed between the liquid inflow unit and the liquid discharge unit to be connected thereto. The helical curve trap unit has a third diameter greater than the first and second diameters. A blade is formed in the helical curve trap unit to trap bubbles.