FABRICATION FOR UNIFORM PLANAR WAVEGUIDE

A uniform planar optical waveguide is made by (a) depositing a lower cladding layer 402 on a substrate 400 and polishing the deposited surface; (b) depositing a core layer on the resultant structure of the step (a) and polishing the deposited surface; (c) patterning the core layer whose surface is p...

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Bibliographische Detailangaben
1. Verfasser:	JUNG, SEON TAE
Format:	Patent
Sprache:	eng
Schlagworte:	ANTENNAS, i.e. RADIO AERIALS BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION WAVEGUIDES
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Beschreibung
Zusammenfassung:	A uniform planar optical waveguide is made by (a) depositing a lower cladding layer 402 on a substrate 400 and polishing the deposited surface; (b) depositing a core layer on the resultant structure of the step (a) and polishing the deposited surface; (c) patterning the core layer whose surface is polished in the step (b), to generate an optical waveguide; and (d) depositing an upper cladding layer on the optical waveguide formed through the patterning of the step (c). In the case of an arrayed waveguide demultiplexer (AWG DEMUX), the phase difference at each channel matches the intended value, thereby decreasing crosstalk.