FABRICATING SYSTEM AND METHOD TO INCREASE NUMBER OF PRODUCTS COMPLETED WITHIN UNIT INTERVAL OF TIME

PURPOSE: A fabricating method is provided to increase the number of products completed within a unit interval of time by shortening an interval of time for completing a series of processes performed on an object to be processed and by improving yield and productivity. CONSTITUTION: One or more proce...

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Bibliographische Detailangaben
Hauptverfasser:	MIZUISHI KENICHI, MURAKAMI EIICHI, YOKOYAMA NATSUKI, KAWAMOTO YOSHIFUMI, KAWAMURA YOSHIO, UTIDA FUMIHIKO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING CONVEYING DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HANDLING THIN OR FILAMENTARY MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS REGULATING SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: A fabricating method is provided to increase the number of products completed within a unit interval of time by shortening an interval of time for completing a series of processes performed on an object to be processed and by improving yield and productivity. CONSTITUTION: One or more process apparatuses are allotted to each lot inserted into a fabrication line according to a predetermined process so that intervals of process time for the respective processes are almost uniform. The interval of time allotted to each lot in the process apparatus and the interval of time allotted to a transfer between the several process apparatuses are scheduled and determined based upon an interval of unit time T common to the fabrication line. According to the scheduled interval of time, each lot is processed in the several process apparatuses and is transferred to one of the several process apparatuses allotted to the next process by a transfer unit.