LIQUID INJECTION APPARATUS

PURPOSE: A liquid injection apparatus is provided to reduce the size of the apparatus by using the attractive force between soft magnetic films. CONSTITUTION: A liquid injection apparatus comprises a substrate(21); a soft magnetic film(22) formed on the substrate; a thin film coil(25) formed on the...

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Bibliographische Detailangaben
Hauptverfasser:	KANG, NAM SEOK, AHN, DONG HUN, CHO, SU JE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY INDUCTANCES MAGNETS SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES TRANSFORMERS
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Beschreibung
Zusammenfassung:	PURPOSE: A liquid injection apparatus is provided to reduce the size of the apparatus by using the attractive force between soft magnetic films. CONSTITUTION: A liquid injection apparatus comprises a substrate(21); a soft magnetic film(22) formed on the substrate; a thin film coil(25) formed on the soft magnetic film; a diaphragm(28) constituted by a soft magnet spaced apart from the thin film coil and arranged at predetermined intervals on the thin film coil; a liquid storage unit formed on the diaphragm; and an orifice plate(33) having a plurality of nozzles(32) formed on the liquid storage unit. The thin film coil is formed into a spiral type, and the gap formed between the soft magnetic film and the diaphragm is 0.1 to 10μm. 연자성막간의 인력을 이용한 액체분사장치에 관한 것으로, 기판상에 형성되는 연자성막과, 연자성막상에 형성되는 박막 코일과, 박막 코일로부터 일정간격을 갖고 박막 코일 상부에 형성되는 연자성체로 이루어진 다이아프램과, 다이아프램상에 형성되는 액체 저장부와, 액체 저장부상에 형성되는 복수개의 노즐을 갖는 오러피스 플레이트로 구성됨으로써, 액체분사장치의 집적화, 소형화, 고성능화가 가능하고, 제조공정이 간단하여 전체적인 공정가를 줄일 수 있다.