METHOD FOR ALIGNING WAFER LOADER

PURPOSE: A method for aligning a wafer loader is provided to be capable of aligning a wafer by using adjacency sensors instead of costly line CCD(Charge-Coupled Device). CONSTITUTION: A wafer(10) being out of position is taken out of a cassette(11) and located under a camera(12) by a robot arm(13)....

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Bibliographische Detailangaben

1. Verfasser:	YOO, WAN SIK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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