TEST PATTERN FOR SEMICONDUCTOR

PURPOSE: A semiconductor test pattern is provided to measure correctly electromigration between metal lines by forming various line width on a small area. CONSTITUTION: A multitude of metal lines(1,2,3) are arranged parallel to each other. The metal lanes(1,2,3) have different line width. A couple o...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	JO, KYUNG SOO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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