PIEZOELECTRIC FLEXIBLE ELEMENT

PURPOSE:To increase the bonding strength between a substrate and piezoelectric plates and to obtain a long-lived piezoelectric flexible element having a good durability against repetitive use by a method wherein the bonded surfaces of the substrate and the piezoelectric plates are covered with electrochemically deposited fine particles. CONSTITUTION:A piezoelectric plate 4 consists of a tabular piezoelectric ceramic 22 and silver electrodes 24 and 26, which cover both surfaces of the ceramic 22 and are used for applying a voltage, and similarly, a piezoelectric plate 6 consists of a tabular piezoelectric ceramic 32 and silver electrodes 34 and 36, which cover both surfaces of ceramic 32 and are used for applying a voltage. A substrate 2 and the plate 4 are bonded together with a bonding agent layer 8 and similarly, the substrate 2 and the plate 6 are bonded together with a bonding agent layer 10. The surfaces of the substrate 2 possess a proper property and a proper roughness due to deposited fine particles 14. Thereby, the bonding strength between the substrate 2 and the plates 4 and 6, which are bonded together with the bonding agent layers 8 and 10, is increased sufficiently.