PULLING UP DEVICE FOR SINGLE CRYSTAL ROD

PURPOSE:To enable the temp. measurement of a melt with high accuracy and to provide a specified diameter of a single crystal rod by providing apertures to an inner shield and outer shield enclosing a crucible and measuring the temp. on the outside surface of the crucible with a radiation thermometer mounted on a shell at the time of pulling up the single crystal rod by a CZ method. CONSTITUTION:The quarts crucible 7 housing the melt 8 is disposed in the steel shell 1 and the graphite crucible 5, a heater 4, the inner shield 3 and the outer shield 2 are disposed in this order around the shell. The small-diameter apertures are bored to the inner shield 3 and the outer shield 2 in the height position corresponding to a liquid level L of the melt 8 and the heater 4 is lacked in the parts corresponding to the apertures. The radiation thermometer 6 is mounted to the steel shell 1 which constitutes the shell. Said radiation thermometer 6 is directed to the apertures. While the temp. of the melt 8 is exactly measured by the radiation thermometer 6, the single crystal rod is pulled up from the melt 8 by the Czochralski method.