METHOD AND APPARATUS FOR REMOVING ORGANIC POLYMER FILM

PURPOSE:To remove a substance adhered to the surface or on a side wall of a mask layer by a method wherein the organic polymer material mask layer is formed on an object to be processed, the object to be processed is processed by making use of an organic polymer material as a mask and a plasma treat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SOMATANI AKIFUMI, KIMIZUKA MASAKATSU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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