MANUFACTURE OF SERIES CONNECTION ARRAY THIN FILM SOLAR BATTERY

PURPOSE: To eliminate the need for characteristics of auxiliary layers, without damaging individual layers by essentially forming a first electrode layer for series connecting thin-film solar cells, before depositing the next layer. CONSTITUTION: A first electrode layer 12 is made of a transparent conductive oxide on a substrate 10 and deposited thereto, then rod-like regions 14, 16 are formed in this layer 12 to function as insulation barriers between intermediate layers 18, 20, 22, and after forming rod-like strips 24, 26, 28, 30 in line, a semiconductor layer 34 covers the entire surface. This layer 34 and second electrode layer 32 are deposited on the entire surface of the first layer 12 and overlapped parts of both layers 34, 32 are removed by the ultrasonic vibration effect to result in free spaces 36, 38, which divide these layers 34, 32 into regions for forming individual thin-film solar cells. A regions 20 of the first electrode layer 12 forms one thin-film solar cell, together with the region 40 of the wiring layer 34 and region 42 of the second electrode layer 32.