MANUFACTURE OF COIL FOR ELECTROMAGNETIC TRANSDUCER

PURPOSE:To obtain a coil conductor having a flat upper face, to form a plating film having a high aspect ratio and to enhance electromagnetic conversion characteristic by alternately continuously multilayer-plating copper and other conductor material when forming the conductor by electrically platin...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HIGAMI FUMINORI, MORI YOSHIHIRO
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PURPOSE:To obtain a coil conductor having a flat upper face, to form a plating film having a high aspect ratio and to enhance electromagnetic conversion characteristic by alternately continuously multilayer-plating copper and other conductor material when forming the conductor by electrically plating. CONSTITUTION:When the coil conductor 5 of a thin film laminated type electromagnetic transducer 1 in which a coil conductor is disposed through an insulating layer in a magnetic circuit formed of an upper pole and a lower pole is formed by electrically plating, copper 9 and other conductor material 10 are alternately continuously multi-layer laminarly plated. For example, when the transducer 1 of a magnetic head is manufactured, SiO2, Al2O3 becoming a gap 4 are deposited on a ceramic substrate 2 formed with a lower magnetic film 3, the same conductor as the coil is deposited, coated with resist thereon, and grooves of approx. 5mum of width are patterned. Then, after a conductive film 9 having 1.49mum of thickness is formed by a copper sulfate plating bath containing no organic additive, an Ni-Fe alloy plating 10 (0.02mum of thickness) is formed thereon, and a copper plating film 9 is further formed thereon.