APPARATUS FOR TESTING ADHESION OF FILM

PURPOSE:To detect the critical load with a smaller-sized construction, ease of handling and high resolving power by constituting a titled apparatus in such a manner that a load sensor and tool for measurement move integrally vertically. CONSTITUTION:A moving body 2 which can be displaced perpendicul...

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Hauptverfasser: NOURA TOKUJI, KOIKE KOUKI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To detect the critical load with a smaller-sized construction, ease of handling and high resolving power by constituting a titled apparatus in such a manner that a load sensor and tool for measurement move integrally vertically. CONSTITUTION:A moving body 2 which can be displaced perpendicularly by a driving source such as motor and the load sensor 4 fitted to the moving body 2 are provided and the tool 5 for measurement is provided to the load sensor 4. A vertical relieving device 8 relieves a sample stage 6 which is provided to face the tool 5 for measurement and is movable in at least one direction within the horizontal plane and the force to be exerted perpendicularly to the stage 6. A signal processing part processes the detection signal of the load sensor 4 when the moving body 2 is gradually displaced by bringing the tool 5 for measurement into contact with a sample 7 imposed on the sample stage 6. The load sensor 4 and the tool 5 for measurement are thus integrally displaced by the driving source and the load is exerted on the sample 7 and, therefore, the size of the apparatus is reduced and the handling thereof is facilitated.