RADIATION SENSITIVE MIXTURE FOR PHOTOSENSITIVE LAYER FORMING MATERIAL
PURPOSE: To improve the photochemical reactivity by forming a photosensitive layer from a mixture of a polymer binder which is insoluble with water and soluble with a water-based alkali solvent and an org. compd. which has an acid decomposing group and can be changed into strong acid by irradiation....
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Zusammenfassung: | PURPOSE: To improve the photochemical reactivity by forming a photosensitive layer from a mixture of a polymer binder which is insoluble with water and soluble with a water-based alkali solvent and an org. compd. which has an acid decomposing group and can be changed into strong acid by irradiation. CONSTITUTION: The radiation-sensitive mixture is prepared from a polymer binder which is insoluble with water and insoluble with a water-based alkali solvent phenolic resin such as a novolac polymer and an org. compd. having an acid decomposing group which forms strong acid by irradiation such as a compd. having onium salt group and t-butylcarbonate group. The mixture is applied to form a thin film on a base body, and the thin film is heated to remove the residual solvent, exposed for an image and heated again. By this treatment, the exposed part has complete durability against a water-base alkali soln., while durability in the unexposed part decreases. Thus, the obtd. radiation- sensitive compsn. has high photochemical reactivity in a wide sensitivity range. |
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