GAS PULSE LASER DEVICE
PURPOSE:To charge uniformly peaking capacitors, and to obtain uniform glow discharge at main discharge electrodes by a method wherein iron-core reactors of the plural number of pieces are arranged along the longitudinal direction of parallel plane type main discharge electrodes to be connected in pa...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To charge uniformly peaking capacitors, and to obtain uniform glow discharge at main discharge electrodes by a method wherein iron-core reactors of the plural number of pieces are arranged along the longitudinal direction of parallel plane type main discharge electrodes to be connected in parallel with the main discharge electrodes thereof. CONSTITUTION:Energy stored to charging capacitors is transferred to peaking capacitors 11 through iron-core reactors 72 according to the ON condition of switching elements, and when the charging voltage of the peaking capacitors 11 thereof reaches the prescribed value, discharge is generated between parallel plane type main discharge electrodes 12a, 12b accommodated in a laser tube filled up with a laser medium of gas to perform laser oscillation. Iron-core reactors 72 of the plural number of pieces are provided in such a device, the reactors thereof are arranged in the longitudinal direction of the main discharge electrodes 12a, 12b, and connected in parallel with the main discharge electrodes 12a, 12b. Acoordingly, leakage inductance of electric circuits between respective preliminary ionization discharge electrodes 13 and the peaking capacitors 11 and the iron-core reactances 72 are made to be nearly uniform, charge of the peaking capacitors is performed also nearly uniformly, and uniform glow discharge can be obtained at the main discharge electrodes. |
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