GAS LASER DEVICE

PURPOSE:To efficiently circulate laser gas thereby to reduce the circulating flow rate of the laser gas to a minimum limit as required, by using an electrode with slitlike holes at a discharge part as one main discharge electrode of a gas laser, and injecting laser medium gas a region to be discharged through the holes. CONSTITUTION:A semicylindrical second main discharge electrode 2 disposed oppositely to a first main discharge electrode 1 opened in many slitlike holes on the surface, a gas supply unit 3 disposed on the rear surface of the electrode 1, and gas exhaust units 4a, 4b disposed at both sides of the electrode 2 are provided, krypton fluoride (KrF) gas is injected from the supply unit 3 through the holes of the electrodes 1 to be excited at a discharger 5 formed at the first and second electrodes to generate laser light when it is dropped to the bottom level, excimer dropped to the bottom level is abruptly dissociated, discharged from the discharge units, and again returned to a circulator.