SURFACE STRUCTURE ANALYZING METHOD

PURPOSE:To easily analyze the surface structure of an extremely small part by making an electron beam incident on a sample while varying its energy and measuring the amount of ions emitted from the sample. CONSTITUTION:The energy of the electron beam 2 incident on the sample 1 is scanned by a scanni...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	DOI SEIZO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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