SURFACE STRUCTURE ANALYZING METHOD

PURPOSE:To easily analyze the surface structure of an extremely small part by making an electron beam incident on a sample while varying its energy and measuring the amount of ions emitted from the sample. CONSTITUTION:The energy of the electron beam 2 incident on the sample 1 is scanned by a scanning power source 3. In such a case, ions 4 emitted from the sample 1 are detected by a mass analyzer 5. The measurement conditions of the mass analyzer 5, however, are so set that only ions to be monitored enters a detector 6. The output of this detector 6 is amplified by an amplifier 7 and inputted as the coordinate of a recorder chart 8. The abscissa is proportional to a voltage generated by the scanning power source 3. A normal analyzing means is applied to a spectrum obtained as mentioned above to make a Fourier analysis, thereby determining interatomic distance and a coordination number. Thus, the surface structure of the extremely small part is easily analyzed.