PHOTO-CVD APPARATUS FOR FORMING UNIFORM COATED FILM

PURPOSE:To form a coated film having uniform thickness, by providing a cart in a vacuum chamber, a cart irradiating light source, and a means for changing the positions of the cart and the light source. CONSTITUTION:Substrates 15 are fixed on the respective faces of a holder 7 for the substrate 15, the vacuum chamber 3 is evacuated, then a gaseous reactant is introduced, and the holder 7 is rotated by a motor 21 when the substrate 15 is heated to a specified temp. by a heating means 23 and kept at that temp. Meanwhile, UV rays are projected on the substrate 15 from the light source 5 consisting of a mercury lamp 19 airtightly surrounded with a quartz tube 17 with one end closed to promote the chemical reaction of the gaseous reactant, and the product is laminated on the substrate 15. In this case, the film is formed while keeping the illuminance of the light source 5 and the rotating speed of the holder 7 constant. More effectively, the rotating speed (or illuminance) is kept constant, and the illuminance (or rotating speed) is appropriately changed in synchronization with each other. As a result, a coated film having uniform thickness can be formed.