MASK SHEET FOR SPUTTERING

MASK SHEET FOR SPUTTERING

PURPOSE:To prevent the warping of a mask sheet used to form thin SiC films and to shorten the time required to form the films by tapering the holes in the mask sheet so that they are extended toward an SiC flying direction. CONSTITUTION:When SiC is deposited on an insulating substrate by sputtering...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: MASUDA MINORU, MIYAMA MASAHIKO
Format: Patent
Sprache:eng
Schlagworte:
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PURPOSE:To prevent the warping of a mask sheet used to form thin SiC films and to shorten the time required to form the films by tapering the holes in the mask sheet so that they are extended toward an SiC flying direction. CONSTITUTION:When SiC is deposited on an insulating substrate by sputtering through a metallic or ceramic sheet 1 having holes 2 as a mask sheet, the holes 2 in the sheet 1 are tapered 3 so that they are extended toward an SiC flying direction. Since the mask sheet 1 for sputtering hardly casts a shadow on the substrate by the tapering even in case where the thickness of the sheet 1 is so increased as to make warp during sputtering negligible, the sputtering time required to obtain SiC films of a prescribed thickness is not prolonged. Accordingly, SiC films of the prescribed thickness are formed on the insulating substrate in a short time with little warp.