SURFACE WORKING METHOD OF OXIDE MATERIAL

A method for working an oxide material, and preferably a ceramic oxide material, with a laser emission of an excimer laser and without the creation of damage layers includes pulsing the laser emission to be impinged on the material to be worked.

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Bibliographische Detailangaben
Hauptverfasser: MIHIAERU AIETSUTO, UORUFURAMU UERUJINGU, DEIITAA BOIERURE, HERUMUUTO TOOMAN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method for working an oxide material, and preferably a ceramic oxide material, with a laser emission of an excimer laser and without the creation of damage layers includes pulsing the laser emission to be impinged on the material to be worked.