MARK DETECTION

PURPOSE:To detect the actual center position of a mark by a method wherein the part of the mark apart from the designed center of the mark by Yn to the (-)Y direction is scanned by a beam to the X direction and the position of the mark apart from the designed center of the mark by Xn to the (-)X dir...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	YUASA TETSUO, ASARI TOSHIHIRO, KOSAKA YASUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE:To detect the actual center position of a mark by a method wherein the part of the mark apart from the designed center of the mark by Yn to the (-)Y direction is scanned by a beam to the X direction and the position of the mark apart from the designed center of the mark by Xn to the (-)X direction is scanned by the the beam to the Y direction and the signals of secondary electrons produced by the respective scanning are detected. CONSTITUTION:A stage 6 on which a marked sample 5 is put is shifted so as to make the designed center position of a mark apart from the position to be measured by Yn to the Y direction. Then the part of the mark apart from the designed center of the mark by Yn to the (-)Y direction is scanned by a beam to the X direction. The stage 6 is shifted so as to make the designed center position of the mark apart from the position to be measured by Xn to the X direction. Then the part of the mark apart from the designed center of the mark by Xn to the (-)X direction is scanned by the beam to the Y direction. The actual center position of the mark is detected in accordance with the signals of the secondary electrons produced by the respective scanning.