METHOD FOR SEALING SNORKEL OF VACUUM DEPOSITION PLATING DEVICE

PURPOSE:To enhance the efficiency of plating operation by sealing the opening of the lower end of a snorkel with a blank flange consisting of the same kind of metal as plating metal, and immersing the blank flange into a plating bath in the case of sucking the plating bath, and dissolving it. CONSTI...

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Bibliographische Detailangaben
Hauptverfasser:	AIKO TAKUYA, TSUKIJI NORIO, KIKKO TOSHIHARU, NAKANISHI KOJI, SODA MASAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PURPOSE:To enhance the efficiency of plating operation by sealing the opening of the lower end of a snorkel with a blank flange consisting of the same kind of metal as plating metal, and immersing the blank flange into a plating bath in the case of sucking the plating bath, and dissolving it. CONSTITUTION:A flange part 18 is formed to the opening of the lower end of a snorkel 17 which communicates the evaporation tank of a vacuum deposition plating device with a dissolving furnace 16 and a blank flange 19 consisting of the same kind of metal as plating metal is fitted thereto. In the case of performing plating, after evacuating the inside of a vapor deposition chamber, the blank flange 19 is inserted into a plating metal bath 21 to dissolve the blank flange 19 and the plating metal bath 21 incorporated in the dissolving furnace 16 is fed to the evaporation tank. Thereby the operation time is shortened and operation efficiency is enhanced.